A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

D. M. Glowacka*, D. J. Goldie, S. Withington, M. Crane, V. Tsaneva, M. D. Audley, A. Bunting

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.

Original languageEnglish
Pages (from-to)249-254
Number of pages6
JournalJournal of Low Temperature Physics
Volume151
Issue number1-2 PART 1
DOIs
Publication statusPublished - 1 Apr 2008

Keywords

  • Submillimeter-wave detectors
  • Superconducting microstrip
  • Transition edge sensors

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