Abstract
Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.
Original language | English |
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Pages (from-to) | 249-254 |
Number of pages | 6 |
Journal | Journal of Low Temperature Physics |
Volume | 151 |
Issue number | 1-2 PART 1 |
DOIs | |
Publication status | Published - 1 Apr 2008 |
Keywords
- Submillimeter-wave detectors
- Superconducting microstrip
- Transition edge sensors