A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

D. M. Glowacka; D. J. Goldie; S. Withington; M. Crane; V. Tsaneva; M. D. Audley; A. Bunting

doi:10.1007/s10909-007-9635-z

A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

D. M. Glowacka^*, D. J. Goldie, S. Withington, M. Crane, V. Tsaneva, M. D. Audley, A. Bunting

^*Corresponding author for this work

School of Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

Abstract

Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.

Original language	English
Pages (from-to)	249-254
Number of pages	6
Journal	Journal of Low Temperature Physics
Volume	151
Issue number	1-2 PART 1
DOIs	https://doi.org/10.1007/s10909-007-9635-z
Publication status	Published - 1 Apr 2008

Keywords

Submillimeter-wave detectors
Superconducting microstrip
Transition edge sensors

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10.1007/s10909-007-9635-z

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title = "A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics",

abstract = "Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.",

keywords = "Submillimeter-wave detectors, Superconducting microstrip, Transition edge sensors",

author = "Glowacka, {D. M.} and Goldie, {D. J.} and S. Withington and M. Crane and V. Tsaneva and Audley, {M. D.} and A. Bunting",

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doi = "10.1007/s10909-007-9635-z",

language = "English",

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T1 - A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

AU - Glowacka, D. M.

AU - Goldie, D. J.

AU - Withington, S.

AU - Crane, M.

AU - Tsaneva, V.

AU - Audley, M. D.

AU - Bunting, A.

PY - 2008/4/1

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N2 - Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.

AB - Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.

KW - Submillimeter-wave detectors

KW - Superconducting microstrip

KW - Transition edge sensors

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A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

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Keywords

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