Low-temperature fabrication of plasmonic titanium nitride thin films by electron beam evaporation (dataset)

The data were collected through experimental characterization as detailed in the main manuscript and are organized into separate folders.
• Ellipsometry Data:
The extracted permittivity data are stored as text files within the Ellipsometry folder. A subfolder named Raw contains the measured ellipsometry data files. Corresponding ellipsometry model files are saved in a proprietary format specific to Woollam's CompleteEase software, which is required to open them.
• XRD, Reflectance, and Transmittance Data:
The exported X-ray diffraction (XRD) data are provided in .xy format. Reflectance and transmittance data are available in Excel format, which can be opened with Microsoft Office or compatible spreadsheet software.